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EM-KLEEN
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PIE plasma cleaners EM-KLEEN
Product Details
Used for SEM, FIB, XPS and ALD vacuum analysis and coating equipment for hydrocarbon contamination cleaning, supporting ZEISS, HITACHI, JEOL, FEI, TESCAN, SPECS systems.
Technical specifications
Working pressure: sample chamber: 0.1-2.5 mTorr, compatible with molecular pump
Power Supply: 13.56MHz 75Wattt RF
Product appearance
Application example
