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Product Details

This system employs the linear motor actuators and air spring for the active vibration isolation. It can suppress vibrational disturbance which allows the ORION NanoFab to maintain a high resolution.

Technical specifications

Item                         Description

Product                   Low height active vibration isolation system

Dimension                  1300(W) x 1600(D) x 182(H, deflated position) mm

Weight                     1100Kg

Isolation Mechanism (1)       6 Active degrees of freedom

Isolation Mechanism (2)       Active Isolation by Linear Motor actuator

Required air pressure          0.6MPa and above

Load weight (maximum)      2000Kg (even load)

Power Supply                 100-240VAC

Power Supply Frequency      50/60Hz

Power Consumption (maximum)    380W

Isolation starting frequency     0.5Hz

Application example